ELECTRON-BEAM-INDUCED NANOSCALE CHEMICAL-REACTIONS

Nanoscale chemical reactions in calcite (CaCO3) induced by a finely focused electron beam is examined by electron energy loss spectroscopy (EELS). Quantitative analysis of the fine structure in the C K-edge as a function of the dynamical evolution of chemical reaction processes has been performed and the results show that the initial decomposition of CaCO3 can be very fast, followed by a slower process leading eventually to the formation of holes. The presence of the surface carbon layer is established and has the role of containing the volatile gas produced.