SPHERICAL-SHELL MODEL OF AN ASYMMETRIC RF DISCHARGE

被引：86

作者：

LIEBERMAN, MA ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

关键词：

D O I：

10.1063/1.343298

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4186 / 4191

页数：6

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