DEPTH RESOLUTION IMPROVEMENTS USING SPECIMEN ROTATION DURING DEPTH PROFILING

被引：24

作者：

GELLER, JD ^{[1
]}

VEISFELD, N ^{[1
]}

机构：

[1] DIGITAL EQUIPMENT CORP,NORTHBORO,MA 01532

来源：

SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 1-2期

关键词：

D O I：

10.1002/sia.740140119

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：95 / 98

页数：4

共 12 条

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[9] ION SPUTTERING YIELD MEASUREMENTS FOR SUBMICROMETER THIN-FILMS [J].

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[10] IMPROVED DEPTH RESOLUTION BY SAMPLE ROTATION DURING AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILING [J].

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