ANALYSIS OF IMPURITY DISTRIBUTION IN HOMOEPITAXIAL N ON N+ FILMS OF GAAS WHICH CONTAIN HIGH-RESISTIVITY REGIONS

被引：33
作者：
DILORENZO, JV
MARCUS, RB
LEWIS, R
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 02期
关键词：
D O I：
10.1063/1.1660088
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：729 / +
页数：1
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