INTERNAL-STRESS AND ADHERENCE OF TITANIUM NITRIDE COATINGS

被引：110

作者：

RICKERBY, DS

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573683

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2809 / 2814

页数：6

共 17 条

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[7]

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[9] INFLUENCE OF THE NITROGEN PARTIAL-PRESSURE ON THE PROPERTIES OF DC-SPUTTERED TITANIUM AND TITANIUM NITRIDE FILMS [J].

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[10] INFLUENCE OF CONDENSATION SURFACE-TEMPERATURE ON MICROSTRUCTURE AND INTRINSIC STRESS IN EVAPORATED CHROMIUM FILMS [J].

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