A THERMODYNAMICAL CALCULATION OF THE TRANSPORT RATE OF ALSB IN A CLOSED-TUBE VAPOR-PHASE GROWTH SYSTEM

被引：3
|
作者：
KITAMURA, N
机构：
[1] Dept. of Electr. Eng., Suzuka Coll. of Technol.
来源：
MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING | 1995年 / 3卷 / 01期
关键词：
D O I：
10.1088/0965-0393/3/1/006
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The transport rate of AlSb in a closed-tube vapor-phase growth system with iodine as a transport agent was calculated thermodynamically. The calculated maximum transport rate was obtained at an I-2 density of about 0.004 mg cm(-3) in the growth-temperature system of 550-600 degrees C. The calculation was compared with the experimental results for AlxGa1-xSb. The calculated I-2 density that gave the maximum transport rate in the AlSb-growth system qualitatively agreed with the experimental results in the AlxGa1-xSb-growth system.
引用
收藏
页码：65 / 70
页数：6
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