Planar positioning stage for micro machining

被引：8

作者：

Bauer, J. ^{[1
]}

Kern, D. ^{[2
]}

Ayhan, S. ^{[3
]}

Scherr, S. ^{[3
]}

Fleischer, J. ^{[1
]}

Seemann, W. ^{[2
]}

Zwick, T. ^{[3
]}

机构：

[1] Karlsruhe Inst Technol, Inst Prod Sci Wbk, Kaiserstr 12, D-76131 Karlsruhe, Germany

[2] Karlsruhe Inst Technol, Itm, D-76131 Karlsruhe, Germany

[3] Karlsruhe Inst Technol, Ihe, D-76131 Karlsruhe, Germany

来源：

PRODUCTION ENGINEERING-RESEARCH AND DEVELOPMENT | 2013年 / 7卷 / 05期

关键词：

Small machine tools; Positioning stage; Hydraulic feed unit; Dry slide bearings; Radar position sensor;

D O I：

10.1007/s11740-013-0474-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The following article presents an approach for a novel positioning stage as basic component of a small machine tool. It is a parallelkinematic machine (BiGlide mechanism), which converts the linear motion of two linear axes into a planar motion. The novel features, which were identified to be crucial for the transition from conventional machine tools to small ones, are: compact and precise feed axes, backlash free motion transmission, and direct measurement of the tool-center-point position and the ability of additional fine positioning. The proposed implementations are: hydraulic feed units, dry slide bearings as rotational joints, highly precise radar sensors and active variable-length struts of the parallelkinematic machine. Some of the simulation results are presented along with measurements of a currently designed prototype.

引用

页码：511 / 516

页数：6

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