LOCALIZED ENHANCED DIFFUSION IN NPN SILICON STRUCTURES

被引:33
作者
GERETH, R
VANLOON, PGG
WILLIAMS, V
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D O I
10.1149/1.2423532
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:323 / +
页数:1
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