EPITAXIAL GROWTH OF SILICON FROM THE PYROLYSIS OF MONOSILANE ON SILICON SUBSTRATES

被引：94

作者：

JOYCE, BA

BRADLEY, RR

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1963年 / 110卷 / 12期

关键词：

D O I：

10.1149/1.2425632

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1235 / 1240

页数：6

共 10 条

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