A DELETERIOUS VAPOR TRANSPORT OF SILICON OXIDE IN PROCESSING OF SILICON PLANAR TRANSISTORS

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作者：

LYON, DH

LINDHOLM, DW

LEWIS, G

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 03期

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O646 [电化学、电解、磁化学];

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081704 ;

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页码：C100 / &

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