THIN PALLADIUM FILMS PREPARED BY METAL-ORGANIC PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION

被引：39
作者：
FEURER, E
SUHR, H
机构：
[1] Univ of Tuebingen, Tuebingen, West Ger, Univ of Tuebingen, Tuebingen, West Ger
来源：
THIN SOLID FILMS | 1988年 / 157卷 / 01期
关键词：
This work has been supported by the Bundesmmlstenum fur Forschung und Technologle;
D O I：
10.1016/0040-6090(88)90348-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
14
引用
收藏
页码：81 / 86
页数：6
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