AN INVESTIGATION OF THE THICKNESS VARIATION OF SPUN-ON THIN-FILMS COMMONLY ASSOCIATED WITH THE SEMICONDUCTOR INDUSTRY

被引：97

作者：

DAUGHTON, WJ ^{[1
]}

GIVENS, FL ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265

来源：

关键词：

D O I：

10.1149/1.2123749

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：173 / 179

页数：7

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[7]

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[8]

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[9]

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