INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON

被引:306
作者
FREEMAN, EC
PAUL, W
机构
来源
PHYSICAL REVIEW B | 1978年 / 18卷 / 08期
关键词
D O I
10.1103/PhysRevB.18.4288
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:4288 / 4300
页数:13
相关论文
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