ION-IMPLANTATION IN BETA-SIC - EFFECT OF CHANNELING DIRECTION AND CRITICAL ENERGY FOR AMORPHIZATION

被引：49

作者：

EDMOND, JA

DAVIS, RF

WITHROW, SP

MORE, KL

机构：

[1] N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695

[2] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831

[3] OAK RIDGE ASSOCIATED UNIV,OAK RIDGE,TN 37831

来源：

JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 02期

关键词：

D O I：

10.1557/JMR.1988.0321

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：321 / 328

页数：8

共 17 条

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[7]

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[8] ELECTRICAL-PROPERTIES OF ION-IMPLANTED P-N-JUNCTION DIODES IN BETA-SIC [J].

EDMOND, JA ;

DAS, K ;

DAVIS, RF .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (03) :922-929

[9]

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[10]

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