BACKGROUND DOPING DEPENDENCE OF SILICON DIFFUSION IN P-TYPE GAAS

被引:59
作者
DEPPE, DG [1 ]
HOLONYAK, N [1 ]
KISH, FA [1 ]
BAKER, JE [1 ]
机构
[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
关键词
D O I
10.1063/1.97958
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:998 / 1000
页数:3
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