ELECTRON-BEAM ENHANCED GROWTH OF CVD-DEPOSITED SILICON ON ALUMINA

被引：6
作者：
HEINEMANN, K
OSAKA, T
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1982年 / 59卷 / 03期
关键词：
D O I：
10.1016/0022-0248(82)90369-4
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：485 / 498
页数：14
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