PARTIAL DISLOCATIONS, COLUMNAR GROWTH, CLUSTERING, AND PINHOLE FORMATION IN ULTRATHIN FILM SEMICONDUCTOR HETEROSTRUCTURES

被引:38
作者
PHILLIPS, JC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期
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D O I
10.1116/1.571123
中图分类号
O59 [应用物理学];
学科分类号
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页码:545 / 550
页数:6
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