FOCUSED ION-BEAM SECONDARY ION MASS-SPECTROMETRY - ION IMAGES AND ENDPOINT DETECTION

被引：18
作者：
HARRIOTT, LR
VASILE, MJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 02期
关键词：
D O I：
10.1116/1.584712
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：181 / 187
页数：7
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