LOW-FREQUENCY PIEZOELECTRIC-TRANSDUCER APPLICATIONS OF ZNO FILM

被引：37

作者：

SHIOSAKI, T ^{[1
]}

KAWABATA, A ^{[1
]}

机构：

[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,KYOTO,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1974年 / 25卷 / 01期

关键词：

D O I：

10.1063/1.1655257

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：10 / 11

页数：2

共 20 条

[1] PREPARATION OF ZNO THIN-FILM TRANSDUCERS BY VAPOR TRANSPORT [J].

BELT, RF ;

FLORIO, GC .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (11) :5215-&

[2] DIELECTRIC PIEZOELECTRIC AND ELECTROMECHANICAL COUPLING CONSTANTS OF ZINC OXIDE CRYSTALS [J].

CRISLER, DF ;

CUPAL, JJ ;

MOORE, AR .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1968, 56 (02) :225-&

[3]

DENBURG DL, 1971, IEEE T SONICS ULTRAS, VSU18, P31

[4] C-AXIS ORIENTATION OF SPUTTERED ZNO FILMS [J].

DYBWAD, GL .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (12) :5192-&

[5]

FAHMY AH, 1972, IEEE T SONICS ULTRAS, VSU19, P346

[6] PERFORMANCE OF SHEAR MODE ZINC OXIDE THIN-FILM ULTRASONIC TRANSDUCERS [J].

FOSTER, NF .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (10) :4202-&

[7] CRYSTALLOGRAPHIC ORIENTATION OF ZINC OXIDE FILMS DEPOSITED BY TRIODE SPUTTERING [J].

FOSTER, NF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :111-&

[8] ZINC OXIDE FILM TRANSDUCERS - (PIEZOELECTRICS - ULTRASONICS - TRANSDUCERS - EFFICIENCY - E) [J].

FOSTER, NF ;

ROZGONYI, GA .

APPLIED PHYSICS LETTERS, 1966, 8 (09) :221-+

[9]

FOSTER NF, 1968, IEEE T SONICS ULTRAS, VSU15, P28

[10] EPITAXIAL ZNO ON SAPPHIRE [J].

GALLI, G ;

COKER, JE .

APPLIED PHYSICS LETTERS, 1970, 16 (11) :439-&

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