THE PRODUCTION OF REPETITIVE SURFACE-FEATURES BY OBLIQUE-INCIDENCE ION-BOMBARDMENT

被引：17

作者：

CARTER, G ^{[1
]}

NOBES, MJ ^{[1
]}

KATARDJIEV, IV ^{[1
]}

机构：

[1] UNIV UPPSALA,SCH ENGN,DEPT TECHNOL,S-75121 UPPSALA,SWEDEN

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1993年 / 68卷 / 02期

关键词：

D O I：

10.1080/01418639308226404

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A generalized model to describe the evolution of surface topography during sputtering erosion by non-normally incident ion bombardment is presented. The lowest-order differential equations are solved for both a continuum description and a stochastic description of erosion and reveal the evolution of travelling-wave-like structures in both cases.

引用

页码：231 / 236

页数：6

共 24 条

[11] SPUTTERING INDUCED TOPOGRAPHY DEVELOPMENT ON FCC METALS [J].

CARTER, G ;

NOBES, MJ ;

WHITTON, JL .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 38 (02) :77-95

[12] ATOMIC MIXING IN THE DEPTH-DEPENDENT DIFFUSION-APPROXIMATION [J].

COLLINS, R ;

JIMENEZRODRIGUEZ, JJ .

RADIATION EFFECTS LETTERS, 1982, 68 (01) :19-23

[13] SUBMICRON-SCALE SURFACE ROUGHENING INDUCED BY ION-BOMBARDMENT [J].

EKLUND, EA ;

BRUINSMA, R ;

RUDNICK, J ;

WILLIAMS, RS .

PHYSICAL REVIEW LETTERS, 1991, 67 (13) :1759-1762

[14]

ERLEWEIN J, 1980, THIN SOLID FILMS, V63, pL39

[15] SCALING OF ROUGH SURFACES - EFFECTS OF SURFACE-DIFFUSION [J].

FAMILY, F .

JOURNAL OF PHYSICS A-MATHEMATICAL AND GENERAL, 1986, 19 (08) :L441-L446

[16]

HOFFMAN S, 1980, SURFACE INTERFACE AN, V2, P148

[17]

JAGER W, 1978, 9TH INT C EL MICR TO, V1, P378

[18] THIN-FILM GROWTH AND THE SHADOW INSTABILITY [J].

KARUNASIRI, RPU ;

BRUINSMA, R ;

RUDNICK, J .

PHYSICAL REVIEW LETTERS, 1989, 62 (07) :788-791

[19] THE APPLICATION OF THE HUYGENS PRINCIPLE TO SURFACE EVOLUTION IN INHOMOGENEOUS, ANISOTROPIC AND TIME-DEPENDENT SYSTEMS [J].

KATARDJIEV, IV ;

CARTER, G ;

NOBES, MJ .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1989, 22 (12) :1813-1824

[20] SURFACE GROWTH IN A MODEL OF MOLECULAR-BEAM EPITAXY WITH CORRELATED NOISE [J].

LAM, PM ;

FAMILY, F .

PHYSICAL REVIEW A, 1991, 44 (08) :4854-4860

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