THE PRODUCTION OF REPETITIVE SURFACE-FEATURES BY OBLIQUE-INCIDENCE ION-BOMBARDMENT

被引：17
作者：
CARTER, G [1 ]
NOBES, MJ [1 ]
KATARDJIEV, IV [1 ]
机构：
[1] UNIV UPPSALA,SCH ENGN,DEPT TECHNOL,S-75121 UPPSALA,SWEDEN
来源：
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1993年 / 68卷 / 02期
关键词：
D O I：
10.1080/01418639308226404
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A generalized model to describe the evolution of surface topography during sputtering erosion by non-normally incident ion bombardment is presented. The lowest-order differential equations are solved for both a continuum description and a stochastic description of erosion and reveal the evolution of travelling-wave-like structures in both cases.
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收藏
页码：231 / 236
页数：6
相关论文
共 24 条
[1]   GROWTH AND EROSION OF THIN SOLID FILMS [J].
BALES, GS ;
BRUINSMA, R ;
EKLUND, EA ;
KARUNASIRI, RPU ;
RUDNICK, J ;
ZANGWILL, A .
SCIENCE, 1990, 249 (4966) :264-268
[2]  
BENNINGHOVEN A, 1971, Z PHYS, V230, P403
[3]   THEORY OF RIPPLE TOPOGRAPHY INDUCED BY ION-BOMBARDMENT [J].
BRADLEY, RM ;
HARPER, JME .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2390-2395
[4]   THE CRITERIA FOR SURFACE REPRODUCIBILITY DURING EROSION OR GROWTH [J].
CARTER, G ;
KATARDJIEV, IV ;
NOBES, MJ ;
SMITH, R .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1987, 55 (06) :779-789
[5]   REPRODUCIBILITY AND STABILITY IN SURFACE MORPHOLOGICAL EVOLUTION [J].
CARTER, G ;
KATARDJIEV, IV ;
NOBES, MJ .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1991, 63 (04) :849-866
[6]  
Carter G., 1988, Diffusion and Defect Data - Solid State Data, Part A (Defect and Diffusion Forum), VA57-A58, P97
[7]   SPUTTER POLISHING OF SURFACES [J].
CARTER, G ;
NOBES, MJ ;
KATARDJIEV, IV .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1992, 66 (03) :419-425
[8]   A 2ND-ORDER EROSION SLOWNESS THEORY OF THE DEVELOPMENT OF SURFACE-TOPOGRAPHY BY ION-INDUCED SPUTTERING [J].
CARTER, G ;
NOBES, MJ ;
WEBB, RP .
JOURNAL OF MATERIALS SCIENCE, 1981, 16 (08) :2091-2102
[9]   INFLUENCE OF SURFACE-DIFFUSION ON TOPOGRAPHY DEVELOPMENT OF AN AMORPHOUS SOLID DURING SPUTTERING [J].
CARTER, G .
JOURNAL OF MATERIALS SCIENCE, 1976, 11 (06) :1091-1098
[10]   THE EVOLUTION OF ATOMIC SCALE TOPOGRAPHY BY SPUTTERING EROSION [J].
CARTER, G ;
NOBES, MJ ;
STOERE, H ;
KATARDJIEV, IV .
SURFACE AND INTERFACE ANALYSIS, 1993, 20 (01) :90-94
123