ELECTRON-MICROSCOPY OF THE GROWTH FEATURES AND CRYSTAL-STRUCTURES OF FILAMENT ASSISTED CVD DIAMOND FILMS

被引：45

作者：

CLAUSING, RE ^{[1
]}

HEATHERLY, L ^{[1
]}

MORE, KL ^{[1
]}

BEGUN, GM ^{[1
]}

机构：

[1] OAK RIDGE NATL LAB,DIV CHEM,OAK RIDGE,TN 37831

来源：

SURFACE & COATINGS TECHNOLOGY | 1989年 / 39卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(89)90054-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：199 / 210

页数：12

共 12 条

[1]

ADAMS DM, 1974, J CHEM SOC, V70, P1959

[2] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].

ANGUS, JC ;

HAYMAN, CC .

SCIENCE, 1988, 241 (4868) :913-921

[3]

DEVRIES RC, 1987, ANNU REV MATER SCI, V17, P161

[4] GROWTH-MECHANISM OF VAPOR-DEPOSITED DIAMOND [J].

FRENKLACH, M ;

SPEAR, KE .

JOURNAL OF MATERIALS RESEARCH, 1988, 3 (01) :133-140

[5] SYNTHESIS OF DIAMONDS BY USE OF MICROWAVE PLASMA CHEMICAL-VAPOR DEPOSITION - MORPHOLOGY AND GROWTH OF DIAMOND FILMS [J].

KOBASHI, K ;

NISHIMURA, K ;

KAWATE, Y ;

HORIUCHI, T .

PHYSICAL REVIEW B, 1988, 38 (06) :4067-4084

[6] GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS [J].

MATSUMOTO, S ;

SATO, Y ;

TSUTSUMI, M ;

SETAKA, N .

JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) :3106-3112

[7] ELECTRON-MICROSCOPIC OBSERVATION OF DIAMOND PARTICLES GROWN FROM THE VAPOR-PHASE [J].

MATSUMOTO, S ;

MATSUI, Y .

JOURNAL OF MATERIALS SCIENCE, 1983, 18 (06) :1785-1793

[8] ON EPITAXIAL-GROWTH OF DIAMOND FILMS ON (100) SILICON SUBSTRATES [J].

NARAYAN, J ;

SRIVATSA, AR ;

PETERS, M ;

YOKOTA, S ;

RAVI, KV .

APPLIED PHYSICS LETTERS, 1988, 53 (19) :1823-1825

[9] DIAMOND AND DIAMOND-LIKE FILMS - DEPOSITION FROM THE VAPOR-PHASE, STRUCTURE AND PROPERTIES [J].

SPITSYN, BV ;

BOUILOV, LL ;

DERJAGUIN, BV .

PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 1988, 17 (02) :79-170

[10]

WILLIAMS BE, 1988, DIAMOND DIAMOND LIKE, P59

← 1 2 →