PREPARATION AND PROPERTIES OF GE MICROCRYSTALS EMBEDDED IN SIO2 GLASS-FILMS

被引：61
作者：
HAYASHI, R
YAMAMOTO, M
TSUNETOMO, K
KOHNO, K
OSAKA, Y
NASU, H
机构：
[1] HIROSHIMA DENKI INST TECHNOL,DEPT ELECT ENGN,HIROSHIMA 73903,JAPAN
[2] MIE UNIV,FAC ENGN,DEPT IND CHEM,TSU,MIE 514,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 04期
关键词：
Germanium; Microcrystals; Optical properties; Quantum size effect; Rf sputtering; SiO[!sub]2[!/sub] glass; Transmission electron microscopy; XPS;
D O I：
10.1143/JJAP.29.756
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Ge microcrystals were successfully doped into SiO2 glass films by the rf magnetron sputtering technique. The dependence of the average size of Ge microcrystals on substrate temperature and annealing time was discussed. The optical absorption spectra of Ge microcrystals clearly exhibited the blue shift compared with a bulk Ge crystal, which seems to be due to a quantum size effect. © 1990 The Japan Society of Applied Physics.
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页码：756 / 759
页数：4
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