LOW-ENERGY POSITRON CHANNELING IN SILICON

被引:6
作者
LOGAN, LR
SCHULTZ, PJ
DAVIES, JA
JACKMAN, TE
机构
[1] MCMASTER UNIV,DEPT ENGN PHYS,HAMILTON L8S 4L8,ONTARIO,CANADA
[2] NATL RES COUNCIL CANADA,MICROSTRUCT SCI LAB,OTTAWA K1A 0R6,ONTARIO,CANADA
关键词
D O I
10.1016/0168-583X(88)90512-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:58 / 61
页数:4
相关论文
共 50 条
[41]   CHANNELING EFFECTS AT LOW-ENERGY ION-IMPLANTATION [J].
BOLLMANN, J ;
MERTENS, A ;
KLOSE, H .
EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 :479-481
[42]   ROLE OF CHANNELING IN THE IMPLANTATION OF LOW-ENERGY IONS. [J].
Stepina, N.P. ;
Kachurin, G.A. .
Soviet physics. Semiconductors, 1983, 17 (03) :278-280
[43]   Theoretical estimate of the low-energy limit to ion channeling [J].
Univ of Technology Vienna, Vienna, Austria .
Nucl Instrum Methods Phys Res Sect B, 1-4 (323-327)
[44]   CHANNELING IN LOW-ENERGY BORON ION-IMPLANTATION [J].
MICHEL, AE ;
KASTL, RH ;
MADER, SR ;
MASTERS, BJ ;
GARDNER, JA .
APPLIED PHYSICS LETTERS, 1984, 44 (04) :404-406
[45]   Positron astrophysics and areas of relation to low-energy positron physics [J].
Guessoum, Nidhal .
EUROPEAN PHYSICAL JOURNAL D, 2014, 68 (05)
[46]   Positron astrophysics and areas of relation to low-energy positron physics [J].
Nidhal Guessoum .
The European Physical Journal D, 2014, 68
[47]   Copper gettering at half the projected ion range induced by low-energy channeling He implantation into silicon [J].
Fichtner, PFP ;
Behar, M ;
Kaschny, JR ;
Peeva, A ;
Koegler, R ;
Skorupa, W .
APPLIED PHYSICS LETTERS, 2000, 77 (07) :972-974
[48]   Low-energy positron scattering upon endohedrals [J].
Amusia, M. Ya. ;
Chernysheva, L. V. .
JETP LETTERS, 2017, 106 (01) :1-6
[49]   AN IMPROVED PULSED LOW-ENERGY POSITRON SYSTEM [J].
WILLUTZKI, P ;
STORMER, J ;
KOGEL, G ;
SPERR, P ;
BRITTON, DT ;
STEINDL, R ;
TRIFTSHAUSER, W .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1994, 5 (05) :548-554
[50]   Low-energy positron scattering upon endohedrals [J].
M. Ya. Amusia ;
L. V. Chernysheva .
JETP Letters, 2017, 106 :1-6