DIAMOND SYNTHESIS SUPPRESSING THE THERMAL-DECOMPOSITION OF METHANE IN A HOT-FILAMENT CVD

被引：10
|
作者：
AIKYO, H
KONDO, KI
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 09期
关键词：
D O I：
10.1143/JJAP.28.L1631
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：L1631 / L1633
页数：3
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