DIAMOND SYNTHESIS SUPPRESSING THE THERMAL-DECOMPOSITION OF METHANE IN A HOT-FILAMENT CVD

被引：10

|

作者：

AIKYO, H

KONDO, KI

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 09期

关键词：

D O I：

10.1143/JJAP.28.L1631

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L1631 / L1633

页数：3

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