DIAMOND SYNTHESIS SUPPRESSING THE THERMAL-DECOMPOSITION OF METHANE IN A HOT-FILAMENT CVD

被引：10
作者：
AIKYO, H
KONDO, KI
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 09期
关键词：
D O I：
10.1143/JJAP.28.L1631
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：L1631 / L1633
页数：3
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[1]   THERMAL-DECOMPOSITION OF METHANE .1. KINETICS OF PRIMARY DECOMPOSITION TO C2H6 + H2 - RATE CONSTANT FOR HOMOGENEOUS UNIMOLECULAR DISSOCIATION OF METHANE AND ITS PRESSURE-DEPENDENCE [J].
CHEN, CJ ;
BACK, MH ;
BACK, RA .
CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1975, 53 (23) :3580-3590
[2]   SYNTHESIS OF DIAMOND THIN-FILMS BY THERMAL CVD USING ORGANIC-COMPOUNDS [J].
HIROSE, Y ;
TERASAWA, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (06) :L519-L521
[3]   DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].
KAMO, M ;
SATO, Y ;
MATSUMOTO, S ;
SETAKA, N .
JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644
[4]   EFFECTS OF OXYGEN ON CVD DIAMOND SYNTHESIS [J].
KAWATO, T ;
KONDO, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (09) :1429-1432
[5]   HIGH-RATE SYNTHESIS OF DIAMOND BY DC PLASMA-JET CHEMICAL VAPOR-DEPOSITION [J].
KURIHARA, K ;
SASAKI, K ;
KAWARADA, M ;
KOSHINO, N .
APPLIED PHYSICS LETTERS, 1988, 52 (06) :437-438
[6]   GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS [J].
MATSUMOTO, S ;
SATO, Y ;
TSUTSUMI, M ;
SETAKA, N .
JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) :3106-3112
[7]   SYNTHESIS OF DIAMOND FILMS IN A RF INDUCTION THERMAL PLASMA [J].
MATSUMOTO, S ;
HINO, M ;
KOBAYASHI, T .
APPLIED PHYSICS LETTERS, 1987, 51 (10) :737-739
[8]   VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE [J].
MATSUMOTO, S ;
SATO, Y ;
KAMO, M ;
SETAKA, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04) :L183-L185
[9]   GROWTH OF DIAMOND THIN-FILMS BY ELECTRON ASSISTED CHEMICAL VAPOR-DEPOSITION [J].
SAWABE, A ;
INUZUKA, T .
APPLIED PHYSICS LETTERS, 1985, 46 (02) :146-147
[10]   SHOCK TUBE STUDIES ON THE PYROLYSIS AND OXIDATION OF METHANE [J].
SKINNER, GB ;
RUEHRWEIN, RA .
JOURNAL OF PHYSICAL CHEMISTRY, 1959, 63 (10) :1736-1742
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