GETTER SPUTTERING AT LOW-TEMPERATURE (CONGRUENT TO 20-DEGREES-K)

被引：1

|

作者：

HAUSER, JJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 32卷 / 03期

关键词：

D O I：

10.1063/1.89969

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：125 / 127

页数：3

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