PREPARATION OF NA+-SELECTIVE ELECTRODES BY ION-IMPLANTATION OF LITHIUM AND SILICON INTO SINGLE-CRYSTAL ALUMINA WAFER AND ITS APPLICATION TO THE PRODUCTION OF ISFET

被引:30
作者
SANADA, Y
AKIYAMA, T
UJIHIRA, Y
NIKI, E
机构
[1] UNIV TOKYO,FAC ENGN,DEPT IND CHEM,BUNKYO KU,TOKYO 113,JAPAN
[2] INST VOCAT TRAINING,SAGAMIHARA,JAPAN
来源
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1982年 / 312卷 / 06期
关键词
D O I
10.1007/BF00636072
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:526 / 529
页数:4
相关论文
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