共 12 条
[1]
THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .1. SYSTEM SPECIFICATION AND DESIGN
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1976, 13 (02)
:591-595
[2]
Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9
[3]
HALLAHAN JR, 1974, TECHNIQUES APPLICATI
[5]
LALAU C, 1970, TOPICS ORGANIC MASS
[6]
LEMMON RM, 1973, ACCOUNTS CHEM RES, V6, P65
[7]
MAESSEL LI, 1970, HDB THIN FILM TECHNO
[10]
NAMBA S, 1975, ADV ELECTRON ELECTRO, V37, P264