THIN-LAYERS DEPOSITED BY THE PYROSOL PROCESS

被引:192
作者
BLANDENET, G
COURT, M
LAGARDE, Y
机构
关键词
D O I
10.1016/0040-6090(81)90362-X
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:81 / 90
页数:10
相关论文
共 10 条
[1]  
BLANDENET G, 1979, COMMUNICATION
[2]  
BLANDENET G, 1975, 5TH INT C CHEM VAP D
[3]  
Rayleigh J.W.S, 1945, THEORY SOUND, VII, P344
[4]  
SPITZ J, 1974, Patent No. 1362803
[5]  
SPITZ J, 1975, Patent No. 3890391
[6]  
SPITZ J, 1975, Patent No. 3880112
[7]  
SPITZ J, 1974, Patent No. 2151809
[8]  
SPITZ J, 1971, Patent No. 838457
[9]  
SPIZ J, 1972, Patent No. 2110622
[10]   CHEMICAL VAPOR-DEPOSITION AT LOW-TEMPERATURES [J].
VIGUIE, JC ;
SPITZ, J .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (04) :585-588