ANISOTROPIC ETCHING OF POLYCRYSTALLINE SILICON WITH A HOT CL2 MOLECULAR-BEAM

被引：42
|
作者：
SUZUKI, K
HIRAOKA, S
NISHIMATSU, S
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 07期
关键词：
D O I：
10.1063/1.341413
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：3697 / 3705
页数：9
相关论文
共 50 条
  • [21] ELECTRON-BEAM-INDUCED CL2 ETCHING OF GAAS
    TANEYA, M
    SUGIMOTO, Y
    HIDAKA, H
    AKITA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1989, 28 (03): : L515 - L517
  • [22] Electron-beam-induced Cl2 etching of GaAs
    Taneya, Mototaka, 1600, (28):
  • [23] Reactive ion-beam etching of InP with Cl2
    Mutoh, Katsuhiko, 1600, (29):
  • [24] SILICON ETCHING WITH OXYGEN MOLECULAR-BEAM ASSISTED BY PREDEPOSITED GERMANIUM
    TATSUMI, T
    NIINO, T
    HIRAYAMA, H
    APPLIED PHYSICS LETTERS, 1990, 56 (07) : 635 - 637
  • [25] REACTIVE ION ETCHING OF SILICON WITH CL2/AR(1)
    POGGE, HB
    BONDUR, JA
    BURKHARDT, PJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (07) : 1592 - 1597
  • [26] Hardmask charging during Cl2 plasma etching of silicon
    Vyvoda, MA
    Li, M
    Graves, DB
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (06): : 3293 - 3307
  • [27] SUPERSONIC MOLECULAR-BEAM STUDY OF THE TRAPPING OF CL2 ON GAAS(110) - DISSOCIATIVE CHEMISORPTION AND DESORPTION
    DELOUISE, LA
    SURFACE SCIENCE, 1991, 244 (1-2) : L87 - L95
  • [28] ANISOTROPIC SI(100) ETCHING INDUCED BY HIGH TRANSLATIONAL ENERGY CL2 MOLECULAR-BEAMS
    TERAOKA, Y
    NISHIYAMA, I
    APPLIED PHYSICS LETTERS, 1993, 63 (24) : 3355 - 3357
  • [29] SMOOTH VERTICAL ETCHING OF ALGAINP BY CL2 REACTIVE ION-BEAM ETCHING
    YOSHIKAWA, T
    SUGIMOTO, Y
    YOSHII, H
    KAWANO, H
    KOHMOTO, S
    ASAKAWA, K
    ELECTRONICS LETTERS, 1993, 29 (02) : 190 - 192
  • [30] VIBRATIONAL AND ROTATIONAL ENERGY-DISTRIBUTIONS IN A HOT CL-2 MOLECULAR-BEAM
    HIRAOKA, S
    SUZUKI, K
    NISHIMATSU, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (07): : 1268 - 1271
12345