ION-BEAM HYDROGENATION OF AMORPHOUS-SILICON

被引：10
|
作者：
TSUO, YS
SMITH, EB
DEB, SK
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 18期
关键词：
D O I：
10.1063/1.98649
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1436 / 1438
页数：3
相关论文
共 50 条
  • [41] DOPING AND HYDROGENATION BY ION-IMPLANTATION OF GLOW-DISCHARGE DEPOSITED AMORPHOUS-SILICON FILMS
    GALLONI, R
    TSUO, YS
    BAKER, DW
    ZIGNANI, F
    APPLIED PHYSICS LETTERS, 1990, 56 (03) : 241 - 243
  • [42] ION-ASSISTED RECRYSTALLIZATION OF AMORPHOUS-SILICON
    PRIOLO, F
    SPINELLA, C
    LAFERLA, A
    RIMINI, E
    FERLA, G
    APPLIED SURFACE SCIENCE, 1989, 43 : 178 - 186
  • [43] Ion-beam synthesis of GaN in silicon
    Sergeev, V. A.
    Korolev, D. S.
    Mikhaylov, A. N.
    Belov, A. I.
    Vasiliev, V. K.
    Smirnov, A. E.
    Nikolitchev, D. E.
    Surodin, S. I.
    Guseinov, D. V.
    Nezhdanov, A. V.
    Markelov, A. S.
    Trushin, V. N.
    Pirogov, A. V.
    Pavlov, D. A.
    Tetelbaum, D. I.
    2ND INTERNATIONAL SCHOOL AND CONFERENCE SAINT-PETERSBURG OPEN ON OPTOELECTRONICS, PHOTONICS, ENGINEERING AND NANOSTRUCTURES (SPBOPEN2015), 2015, 643
  • [44] ION-BEAM INDUCED OXIDATION OF SILICON
    HOLMEN, G
    JACOBSSON, H
    APPLIED PHYSICS LETTERS, 1988, 53 (19) : 1838 - 1840
  • [45] PULSED ION-BEAM MELTING OF SILICON
    FASTOW, R
    MARON, Y
    MAYER, J
    PHYSICAL REVIEW B, 1985, 31 (02): : 893 - 898
  • [46] GERMANIUM AND SILICON ION-BEAM DEPOSITION
    MIYAKE, K
    TOKUYAMA, T
    THIN SOLID FILMS, 1982, 92 (1-2) : 123 - 129
  • [47] ION-BEAM MIXING IN SILICON SYSTEMS
    PAINE, BM
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 530 : 114 - 121
  • [48] Ion-beam analysis of silicon carbide
    Leavitt, JA
    McIntyre, LC
    Ashbaugh, MD
    Cox, RP
    Lin, Z
    Gregory, RB
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 118 (1-4): : 613 - 616
  • [49] ION-BEAM INDUCED EPITAXY OF SILICON
    GOLECKI, I
    CHAPMAN, GE
    LAU, SS
    TSAUR, BY
    MAYER, JW
    PHYSICS LETTERS A, 1979, 71 (2-3) : 267 - 269
  • [50] PULSED ION-BEAM IRRADIATION OF SILICON
    CHU, WK
    MADER, SR
    GOREY, EF
    BAGLIN, JEE
    HODGSON, RT
    NERI, JM
    HAMMER, DA
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3): : 443 - 447
12345