ION-BEAM HYDROGENATION OF AMORPHOUS-SILICON

被引：10
|
作者：
TSUO, YS
SMITH, EB
DEB, SK
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 18期
关键词：
D O I：
10.1063/1.98649
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1436 / 1438
页数：3
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