KEV X-RAY-PRODUCTION USING 50-MJ KRF LASER-PRODUCED PLASMAS AT 1-PS AND 100-PS

被引:28
作者
BROUGHTON, JN [1 ]
FEDOSEJEVS, R [1 ]
机构
[1] UNIV ALBERTA,DEPT ELECT ENGN,EDMONTON T6G 2G7,ALBERTA,CANADA
关键词
D O I
10.1063/1.354518
中图分类号
O59 [应用物理学];
学科分类号
摘要
The emission of 800-1400 eV x rays from plasmas produced by KrF discharge laser pulses with durations in the range of 1 and 100 ps with energies up to 50 mJ has been studied using various metal targets. The emission spectra, angular distribution, and x-ray conversion efficiencies into 2pi Sr have been measured in vacuum. Peak conversion efficiencies of 10%-13% were obtained for Fe, Co, Ni, Cu, and Zn when a 90 ps, 50 mJ pulse was used. A 2 ps, 40 mJ pulse yielded efficiencies of 8%-10% with plasma reflectivity accounting for the reduction in conversion efficiency. An 850 fs, 35 mJ pulse gave reduced yields of 4% for Cu. In a background gas of 1 atm helium a reduction of conversion efficiency by 15% was observed for 90 ps pulses.
引用
收藏
页码:3712 / 3723
页数:12
相关论文
共 30 条
[1]   EFFICIENT KEV X-RAY GENERATION FROM 50 MJ KRF LASER PLASMAS [J].
BROUGHTON, JN ;
FEDOSEJEVS, R .
APPLIED PHYSICS LETTERS, 1992, 60 (15) :1818-1820
[2]   X-RAY GENERATION FROM 50-MJ, 120-PS KRF LASER-PRODUCED PLASMAS [J].
BROUGHTON, JN ;
FEDOSEJEVS, R .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (03) :1153-1162
[3]   LASER PLASMA X-RAY SOURCES FOR MICROLITHOGRAPHY [J].
CHAKER, M ;
PEPIN, H ;
BAREAU, V ;
LAFONTAINE, B ;
TOUBHANS, I ;
FABBRO, R ;
FARAL, B .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (03) :892-899
[4]  
EIDMANN K, 1988, INERTIAL CONFINEMENT, P65
[5]   ABSORPTION OF SUBPICOSECOND ULTRAVIOLET-LASER PULSES IN HIGH-DENSITY PLASMA [J].
FEDOSEJEVS, R ;
OTTMANN, R ;
SIGEL, R ;
KUHNLE, G ;
SZATMARI, S ;
SCHAFER, FP .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1990, 50 (02) :79-99
[6]  
FEDOSEJEVS R, 1992, SPIE, V1671, P373
[7]   CLASSIFICATION OF THE X-RAY-SPECTRA OF TRANSITIONS IN THE NE, F AND O-I ISOELECTRONIC-SEQUENCES OF THE ELEMENTS FROM IRON TO BROMINE AND IN THE NA-I ISOELECTRONIC SEQUENCE OF GALLIUM TO BROMINE [J].
GORDON, H ;
HOBBY, MG ;
PEACOCK, NJ .
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1980, 13 (10) :1985-1999
[8]   TEMPERATURE AND X-RAY-INTENSITY SCALING IN KRF LASER PLASMA INTERACTION [J].
GUPTA, PD ;
POPIL, R ;
FEDOSEJEVS, R ;
OFFENBERGER, AA ;
SALZMANN, D ;
CAPJACK, CE .
APPLIED PHYSICS LETTERS, 1986, 48 (02) :103-105
[9]  
HALL R, 1980, THESIS U LEICESTER
[10]   HIGH-RESOLUTION X-RAY SPECTROSCOPIC DIAGNOSTICS OF LASER-HEATED AND ICF PLASMAS [J].
HAUER, AA ;
DELAMATER, ND ;
KOENIG, ZM .
LASER AND PARTICLE BEAMS, 1991, 9 (01) :3-48