INTRINSIC DIFFUSION OF BORON AND PHOSPHORUS IN SILICON FREE FROM SURFACE EFFECTS

被引：75
作者：
GHOSHTAGORE, RN
机构：
来源：
PHYSICAL REVIEW B-SOLID STATE | 1971年 / 3卷 / 02期
关键词：
D O I：
10.1103/PhysRevB.3.389
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
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页码：389 / +
页数：1
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