SURFACE-ANALYSIS FOR THE CHARACTERIZATION OF DEFECTS IN THIN-FILM PROCESSES

被引：0
|
作者：
LALEZARI, R
KNOLLENBERG, RG
机构：
来源：
SURFACE CHARACTERIZATION AND TESTING II | 1989年 / 1164卷
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：222 / 235
页数：14
相关论文
共 50 条
  • [31] SURFACE AND THIN-FILM ANALYSIS BY ION SCATTERING TECHNIQUES
    POATE, JM
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (11): : 1343 - 1343
  • [32] Micromechanical thin-film characterization
    Scherge, M
    Mollenhauer, O
    Spiller, F
    Schaefer, JA
    IN SITU PROCESS DIAGNOSTICS AND MODELLING, 1999, 569 : 139 - 144
  • [33] RADIOLYSIS OF A SURFACE-ACTIVE SUBSTANCE IN A THIN-FILM OF SOLUTION PROCESSES OCCURRING IN THE FILM
    FILIPPOV, MT
    MAKAROCHKINA, LM
    DZHAGATSPANYAN, RV
    HIGH ENERGY CHEMISTRY, 1979, 13 (01) : 37 - 40
  • [34] Characterization of thin-film thickness
    Pourjamal, Sara
    Mantynen, Henrik
    Jaanson, Priit
    Rosu, Dana Maria
    Hertwig, Andreas
    Manoocheri, Farshid
    Ikonen, Erkki
    METROLOGIA, 2014, 51 (06) : S302 - S308
  • [35] FLOW PROCESSES IN THIN-FILM EVAPORATORS
    GODAU, HJ
    INTERNATIONAL CHEMICAL ENGINEERING, 1975, 15 (03): : 445 - 449
  • [36] Improving thin-film properties and processes
    LaCourt, D
    R&D MAGAZINE, 2000, 42 (09): : S15 - S16
  • [37] Radiophysical Processes in Thin-Film Structures
    Bezuglov, Dmitry A.
    Sinyaysky, Gennady P.
    Cherckesova, Larissa V.
    Shein, Alexander G.
    Shalamov, George N.
    Zaichenko, Alexander N.
    Manaenkova, Olga N.
    PROCEEDINGS OF 2016 IEEE EAST-WEST DESIGN & TEST SYMPOSIUM (EWDTS), 2016,
  • [38] Intensification of processes in thin-film reactors
    Melz, B
    Kaiser, B
    CHEMICAL ENGINEERING & TECHNOLOGY, 2002, 25 (01) : 35 - 37
  • [39] THIN-FILM PROCESSES FOR MICROELECTRONIC APPLICATION
    GREGOR, LV
    PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1971, 59 (10): : 1390 - &
  • [40] THIN-FILM OPTICAL CHARACTERIZATION
    ANDERSON, WJ
    HANSEN, WN
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (03): : 451 - 451
12345