HIGH-PERFORMANCE OF HIGH-VOLTAGE 4H-SIC SCHOTTKY-BARRIER DIODES

被引:222
作者
ITOH, A
KIMOTO, T
MATSUNAMI, H
机构
[1] Department of Electrical Engineering, Kyoto University
关键词
D O I
10.1109/55.790735
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High performance of high-voltage rectifiers could be realized utilizing 4H-SiC Schottky barrier diodes, A typical specific on-resistance (R(on)) of these devices was 1.4 x 10(3) Omega cm(3) at 24 degrees C (room temperature) with breakdown voltages as high as 800 V. These devices based on 4H-SiC had R(on)'s lower than 6H-SiC based high-power rectifiers with the same breakdown voltage, As for Schottky contact metals, Au, Ni, and Ti were employed in this study, The barrier heights of these metals for 4H-SiC were determined by the analysis of current-voltage characteristics, and the reduction of power loss could be achieved by controlling the barrier heights.
引用
收藏
页码:280 / 282
页数:3
相关论文
共 17 条
[1]   A SIMPLE EDGE TERMINATION FOR SILICON-CARBIDE DEVICES WITH NEARLY IDEAL BREAKDOWN VOLTAGE [J].
ALOK, D ;
BALIGA, BJ ;
MCLARTY, PK .
IEEE ELECTRON DEVICE LETTERS, 1994, 15 (10) :394-395
[2]   POWER SEMICONDUCTOR-DEVICE FIGURE OF MERIT FOR HIGH-FREQUENCY APPLICATIONS [J].
BALIGA, BJ .
IEEE ELECTRON DEVICE LETTERS, 1989, 10 (10) :455-457
[3]  
BALIGA BJ, 1987, MODERN POWER DEVICES
[4]   ELECTRON MOBILITY MEASUREMENTS IN SIC POLYTYPES [J].
BARRETT, DL ;
CAMPBELL, RB .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (01) :53-+
[5]   COMPARISON OF 6H-SIC, 3C-SIC, AND SI FOR POWER DEVICES [J].
BHATNAGAR, M ;
BALIGA, BJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (03) :645-655
[6]   HIGH-FREQUENCY PERFORMANCE OF SIC HETEROJUNCTION BIPOLAR-TRANSISTORS [J].
GAO, GB ;
STERNER, J ;
MORKOC, H .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (07) :1092-1097
[7]  
GOTZ W, 1992, J APPL PHYS, V73, P3332
[8]   HIGH-QUALITY 4H-SIC HOMOEPITAXIAL LAYERS GROWN BY STEP-CONTROLLED EPITAXY [J].
ITOH, A ;
AKITA, H ;
KIMOTO, T ;
MATSUNAMI, H .
APPLIED PHYSICS LETTERS, 1994, 65 (11) :1400-1402
[9]   CONTROLLED SUBLIMATION GROWTH OF SINGLE CRYSTALLINE 4H-SIC AND 6H-SIC AND IDENTIFICATION OF POLYTYPES BY X-RAY-DIFFRACTION [J].
KANAYA, M ;
TAKAHASHI, J ;
FUJIWARA, Y ;
MORITANI, A .
APPLIED PHYSICS LETTERS, 1991, 58 (01) :56-58
[10]   HIGH-VOLTAGE (GREATER-THAN 1-KV) SIC SCHOTTKY-BARRIER DIODES WITH LOW ON-RESISTANCES [J].
KIMOTO, T ;
URUSHIDANI, T ;
KOBAYASHI, S ;
MATSUNAMI, H .
IEEE ELECTRON DEVICE LETTERS, 1993, 14 (12) :548-550