FABRICATION OF FERROELECTRIC BI4TI3O12 THIN-FILMS BY DIPPING-PYROLYSIS OF METAL NAPHTHENATES AND MICROPATTERNS BY AN ELECTRON-BEAM

被引：46

作者：

KAKIMI, A ^{[1
]}

OKAMURA, S ^{[1
]}

YAGI, Y ^{[1
]}

MORI, K ^{[1
]}

TSUKAMOTO, T ^{[1
]}

机构：

[1] SCI UNIV TOKYO, YAMAGUCHI COLL, YAMAGUCHI 756, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1994年 / 33卷 / 9B期

关键词：

THIN FILM; BI4TI3O12; FERROELECTRIC; DIPPING PYROLYSIS; METAL NAPHTHENATE; ELECTRON BEAM; MICROPATTERNING;

D O I：

10.1143/JJAP.33.5301

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fabrication of ferroelectric Bi4Ti3O12 thin films was carried out by dipping pyrolysis of metal naphthenates. Single-phase Bi4Ti3O12 thin films with c-axis orientation perpendicular to the substrate surface were fabricated on Pt plates. They exhibited good ferroelectric properties: coercive held of 7.7 kV/cm and remanent polarization of 8.2 mu C/cm(2). For the films fabricated on Pt/Ti/SiO2/Si substrates, however, the Bi2Ti2O7 phase mainly grew because of Ti diffusion into the bismuth titanate layer during the heat treatment. Fine micropatterns with linewidth of less than 1 mu m in precursors of Bi4Ti3O12 were formed by spin-coating, irradiation with an electron beam and development. They were crystallized into the Bi4Ti3O12 phase by successive pyrolysis and annealing. The reaction between the metal naphthenate films and energized electrons was studied by IR spectroscopic analysis.

引用

页码：5301 / 5304

页数：4