OPTICAL AND ELECTRICAL-PROPERTIES OF SPUTTER-DEPOSITED MO-DOPED TIN OXIDE THIN-FILMS

被引：4
作者：
STJERNA, B
GRANQVIST, CG
机构：
[1] Physics Department, Chalmers University of Technology and University of Gothenburg, Gothenburg
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1993年 / 26卷 / 06期
关键词：
D O I：
10.1088/0022-3727/26/6/021
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Electrical resistivity and optical properties were studied for reactively RF-sputtered tin oxide films with and without molybdenum doping. In contrast with some earlier results, we were unable to find that the molybdenum contributed to a low resistivity.
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页码：1011 / 1012
页数：2
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