STRUCTURE-RELATED OPTICAL-PROPERTIES OF THIN-FILMS

被引:159
作者
MACLEOD, HA
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573894
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:418 / 422
页数:5
相关论文
共 37 条
[11]   RELATIONSHIP BETWEEN OPTICAL INHOMOGENEITY AND FILM STRUCTURE [J].
HARRIS, M ;
MACLEOD, HA ;
OGURA, S ;
PELLETIER, E ;
VIDAL, B .
THIN SOLID FILMS, 1979, 57 (01) :173-178
[12]  
HODGKINSON IJ, 1983, J OPT SOC AM, V73, P1871
[13]   IR ANALYSIS OF WATER-ABSORPTION IN OPTICAL MULTILAYER STRUCTURES [J].
HOLM, NE ;
CHRISTENSEN, O .
THIN SOLID FILMS, 1980, 67 (02) :239-244
[14]  
HOROWITZ F, 1983, P SOC PHOTO-OPT INST, V380, P83, DOI 10.1117/12.934745
[15]  
HOROWITZ F, 1983, THESIS U ARIZONA, P71113
[16]   A COMPARISON OF THIN-FILM MEASUREMENT BY GUIDED-WAVES, ELLIPSOMETRY AND REFLECTOMETRY [J].
KING, RJ ;
TALIM, SP .
OPTICA ACTA, 1981, 28 (08) :1107-1123
[17]   POROSITY OF MGF2 FILMS - EVALUATION BASED ON CHANGES IN REFRACTIVE INDEX DUE TO ADSORPTION OF VAPORS [J].
KINOSITA, K ;
NISHIBORI, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04) :730-+
[18]   OPTISCHE UNTERSUCHUNGEN ZUR WASSERDAMPFSORPTION IN AUFDAMPFSCHICHTEN (INSBESONDERE IN MGF2-SSHICHTEN) [J].
KOCH, H .
PHYSICA STATUS SOLIDI, 1965, 12 (02) :533-&
[19]  
Lee C.-C, 1983, MOISTURE ADSORPTION
[20]  
LEE CC, 1983, J OPT SOC AM, V73, P1871