The growth characteristics and the magnetic properties of Mn-substituted garnet films grown on (110) oriented substrates are reported. On perfectly oriented substrates hillocks are observed which occur due to the fact that (110) is a habit face. By the introduction of a slight misorientation of the substrates, the hillocks disappear and the surfaces are perfectly flat. Mn is substituted in the garnet to obtain the right magneto-elastic properties. It is shown that the temperature dependence of the magnetic parameters can be adjusted such as required to provide a device material.