STUDY ON THE SURFACE OXIDATION OF CO-CR FILMS

被引:6
|
作者
KITAKAMI, O
OGAWA, Y
YAMAGATA, S
DAIMON, H
MARO, T
机构
[1] Tsukuba Research Laboratory, Hitachi Maxell, Ltd., Mitsukaido, Ibaraki, 300-25
关键词
D O I
10.1109/20.104835
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The tribological properties of a Co-Cr thin film were greatly improved by surface oxidation. According to surface analyses, it was found that a Cr -rich oxidized region in which Cr is oxidized to Cr2O3 was formed near the surface of the film by the above treatment. This Cr -rich oxidized region mainly composed of Cr2O3plays an important role in improving its tribological properties. © 1990 IEEE
引用
收藏
页码:2676 / 2678
页数:3
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