REACTION-MECHANISM FOR FLUORINE ETCHING OF SILICON

被引：52

|

作者：

GARRISON, BJ ^{[1
]}

GODDARD, WA ^{[1
]}

机构：

[1] CALTECH,ARTHUR AMOS NOYES LAB CHEM PHYS,PASADENA,CA 91125

来源：

PHYSICAL REVIEW B | 1987年 / 36卷 / 18期

关键词：

D O I：

10.1103/PhysRevB.36.9805

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：9805 / 9808

页数：4

相关论文

共 50 条

[41] REACTION-MECHANISM OF CATALYTIC REDUCTION OF NO BY UREA
TACHI, T
KATO, A
YAMASHITA, H
NIPPON KAGAKU KAISHI, 1992, (08) : 812 - 816
[42] ESSENTIAL HISTIDINE IN REACTION-MECHANISM OF FLAVOENZYME
STEENKAM.DJ
SCHABORT, JC
SOUTH AFRICAN JOURNAL OF SCIENCE, 1974, 70 (03) : 85 - 85
[43] ALUMINA CARBONITRIDING - A REACTION-MECHANISM APPROACH
MORESMAU, JM
MARTY, F
LEFORT, P
BILLY, M
JOURNAL DE CHIMIE PHYSIQUE ET DE PHYSICO-CHIMIE BIOLOGIQUE, 1987, 84 (05) : R16 - R16
[44] BRANCHING REACTION-MECHANISM OF GLUTATHIONE REDUCTASE
MANNERVIK, B
BIOCHEMICAL AND BIOPHYSICAL RESEARCH COMMUNICATIONS, 1973, 53 (04) : 1151 - 1158
[45] REACTION-MECHANISM OF MITOCHONDRIAL MALATE DEHYDROGENASE
SHORE, JD
WEIDIG, CF
FEDERATION PROCEEDINGS, 1975, 34 (03) : 568 - 568
[46] A SIMPLIFIED REACTION-MECHANISM FOR PROPANE COMBUSTION
DEUR, JM
KUNDU, KP
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1992, 203 : 120 - FUEL
[47] REACTION-MECHANISM OF ALKYLATED AROMATICS WITH DICHLOROCARBENE
MULLER, B
WEYERSTAHL, P
TETRAHEDRON, 1976, 32 (07) : 865 - 866
[48] SALT AND SOLVENT EFFECTS ON REACTION-MECHANISM
CORSARO, G
JOURNAL OF CHEMICAL EDUCATION, 1977, 54 (08) : 483 - 484
[49] THE REACTION-MECHANISM OF XANTHINE-OXIDASE
HILLE, R
ACS SYMPOSIUM SERIES, 1993, 535 : 22 - 37
[50] SYNTHESIS OF ORTHORHOMBIC CROOH AND REACTION-MECHANISM
SHIBASAKI, Y
MATERIALS RESEARCH BULLETIN, 1972, 7 (10) : 1125 - +

← 1 2 3 4 5 →