STRUCTURAL AND COMPOSITIONAL CHARACTERIZATION OF RF SPUTTER-DEPOSITED NI-CR+CR2O3 FILMS

被引：3
作者：
BHUSHAN, B
机构：
来源：
JOURNAL OF LUBRICATION TECHNOLOGY-TRANSACTIONS OF THE ASME | 1981年 / 103卷 / 02期
关键词：
D O I：
10.1115/1.3251632
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
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页码：211 / 217
页数：7
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