RECENT ADVANCES IN ORGANIC RESIST MATERIALS .2.

被引：0

作者：

WILLSON, CG ^{[1
]}

BOWDEN, MJ ^{[1
]}

机构：

[1] BELLCORE,BELL COMMUN RES,DIV CHEM & MAT SCI RES,REDBANK,NJ 07701

来源：

关键词：

D O I：

暂无

中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

摘要：

引用

页码：182 / 189

页数：8

共 34 条

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[9] COOPMANS F, 1987, SOLID STATE TECHNOL, V30, P93
[10] Feely W. E., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V631, P48, DOI 10.1117/12.963625