REM OBSERVATIONS OF SI(HHK) SURFACES AND THEIR VICINAL SURFACES

被引：28
|
作者：
SUZUKI, T [1 ]
TANISHIRO, Y [1 ]
MINODA, H [1 ]
YAGI, K [1 ]
SUZUKI, M [1 ]
机构：
[1] NIPPON TELEGRAPH & TEL PUBL CORP, INTERDISCIPLINARY RES LABS, MUSASHINO, TOKYO 180, JAPAN
来源：
SURFACE SCIENCE | 1993年 / 298卷 / 2-3期
关键词：
D O I：
10.1016/0039-6028(93)90063-P
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Clean Si(hhk) surfaces and their vicinal surfaces, especially surfaces between the (113) and (114) surfaces, were studied by ultra-high vacuum reflection electron microscopy (REM) and diffraction (RHEED). The observations were carried out on inner cylindrical surfaces (0.4 mm in diameter) formed in Si(110) specimens (1 x 7 x 0.4 mm3). On the cylindrical surfaces 13 flat surfaces were recognized. REM images and RHEED patterns showed that vicinal surfaces between the (113) and (114) surfaces were composed of terraces of the (113) and (114) surfaces and the structures depended on the direction of the DC current heating the specimen.
引用
收藏
页码：473 / 477
页数：5
相关论文
共 50 条
  • [21] TEMPERATURE-DEPENDENCE OF VICINAL SI(111) SURFACES
    PHANEUF, RJ
    WILLIAMS, ED
    BARTELT, NC
    PHYSICAL REVIEW B, 1988, 38 (03): : 1984 - 1993
  • [22] Kinetic growth instabilities on vicinal Si(001) surfaces
    Schelling, C
    Springholz, G
    Schäffler, F
    PHYSICAL REVIEW LETTERS, 1999, 83 (05) : 995 - 998
  • [23] UNBINDING OF DOUBLE STEPS ON VICINAL SI(001) SURFACES
    VILFAN, I
    SURFACE SCIENCE, 1993, 289 (1-2) : L604 - L608
  • [24] THE ROUGHENING AND PINNING TRANSITION ON VICINAL SURFACES OF SI(100)
    SALANON, B
    BARBIER, L
    LAPUJOULADE, J
    APPLIED SURFACE SCIENCE, 1993, 65-6 : 575 - 579
  • [25] Step dynamics in faceting on vicinal Si(113) surfaces
    Sudoh, K
    Iwasaki, H
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2003, 15 (47) : S3241 - S3253
  • [26] RHEED INTENSITY FROM VICINAL SI(100) SURFACES
    KAWAMURA, T
    PROGRESS OF THEORETICAL PHYSICS SUPPLEMENT, 1991, (106): : 295 - 301
  • [27] EFFECT OF NH3 ON SI(100) VICINAL SURFACES
    CHERIF, SM
    LACHARME, JP
    SEBENNE, CA
    SURFACE SCIENCE, 1991, 251 : 737 - 741
  • [28] Direct current heating effects on Si(111) vicinal surfaces
    Minoda, H
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2003, 15 (47) : S3255 - S3280
  • [29] Formation mechanism of peculiar structures on vicinal Si(110) surfaces
    Yamashita, M.
    Nakamura, Y.
    Sugimoto, R.
    Kikkawa, J.
    Izunome, K.
    Sakai, A.
    APPLIED SURFACE SCIENCE, 2013, 267 : 53 - 57
  • [30] In-phase step wandering on vicinal Si(111) surfaces
    Natori, A
    Suga, N
    APPLIED SURFACE SCIENCE, 2002, 190 (1-4) : 96 - 102
12345