LITHOGRAPHIC PATTERNING OF CONDUCTING POLYMERS AND THEIR COMPOSITES

被引:24
作者
BARGON, J [1 ]
BEHNCK, W [1 ]
WEIDENBRUCK, T [1 ]
UENO, T [1 ]
机构
[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN
关键词
D O I
10.1016/0379-6779(91)91564-Q
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Intrinsically conducting polymers can be shaped into patterns using a lithographic approach which takes advantage of the photosensitivity of certain oxidants. For this purpose a composite consisting of a photosensitive oxidant and a suitable binder polymer is exposed to visible, UV- or actinic radiation and subsequently developed into a pattern of a conducting composite in a pyrrole vapor. This two-dimensional pattern can either be etched into a three-dimensional structure, or it may be reinforced electrochemically via electroplating a metal on top of the patterned conducting composite. A typical example is the system PVC, Fe(III)-salts and pyrrole.
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页码:1111 / 1114
页数:4
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