INFLUENCE OF IMPURITIES ON SURFACE STRUCTURES AND FAULT GENERATION IN HOMOEPITAXIAL SI(111) FILMS

被引：41
作者：
THOMAS, RN
FRANCOMBE, MH
机构：
来源：
SURFACE SCIENCE | 1971年 / 25卷 / 02期
关键词：
D O I：
10.1016/0039-6028(71)90257-3
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：357 / +
页数：1
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