XPS AND SIMS CHARACTERIZATION OF METAL-OXIDE AMORPHOUS-SILICON CARBON INTERFACES

被引:12
作者
EICKE, A
BILGER, G
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D O I
10.1002/sia.740120605
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:344 / 350
页数:7
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共 26 条
[1]   EVIDENCE FOR A SOLID-STATE REACTION AT THE A-SI-SNOX INTERFACE - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY [J].
BADRINARAYANAN, S ;
SINHA, S ;
SINHA, APB .
THIN SOLID FILMS, 1986, 144 (01) :133-137
[2]   STRUCTURAL-PROPERTIES OF A-SIC-H-ALLOYS AND A-SIN-H-ALLOYS FROM XPS-ANALYSES AND IR-ABSORPTION [J].
BAUER, GH ;
MOHRING, HD ;
BILGER, G ;
EICKE, A .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 :873-876
[3]  
BERRESHEIM A, 1983, EMPIRICAL ATOMIC SEN
[4]  
BETZ G, 1983, TOPICS APPL PHYS, V52, P78
[5]   HYDROGEN EVOLUTION FROM A-SI-C-H AND A-SI-GE-H ALLOYS [J].
BEYER, W ;
WAGNER, H ;
FINGER, F .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 :857-860
[6]  
BILGER G, 1987, 19TH P IEEE PHOT SPE, P615
[7]  
ESER F, 1987, 7TH P EC PHOT SOL EN, P560
[8]   DIFFUSION OF INDIUM AND TIN INTO A-SIO-H FROM TRANSPARENT ELECTRODE STUDIED BY XPS [J].
FUKADA, N ;
FUKUSHIMA, Y ;
IMURA, T ;
HIRAKI, A .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :525-528
[9]  
Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406
[10]   COMPUTER-SIMULATION OF KNOCK-ON EFFECT UNDER ION-BOMBARDMENT [J].
ISHITANI, T ;
SHIMIZU, R .
PHYSICS LETTERS A, 1974, A 46 (07) :487-488