XPS AND SIMS CHARACTERIZATION OF METAL-OXIDE AMORPHOUS-SILICON CARBON INTERFACES

被引:12
作者
EICKE, A
BILGER, G
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D O I
10.1002/sia.740120605
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:344 / 350
页数:7
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