SCALING WEDGE FOR DIRECT READOUT OF INTERFEROMETRIC STEP HEIGHTS

被引：0

作者：

KING, EL

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1971年 / 42卷 / 06期

关键词：

D O I：

10.1063/1.1685256

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：886 / &

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